JPH0728694Y2 - 半導体基板イオン注入装置 - Google Patents

半導体基板イオン注入装置

Info

Publication number
JPH0728694Y2
JPH0728694Y2 JP1988130168U JP13016888U JPH0728694Y2 JP H0728694 Y2 JPH0728694 Y2 JP H0728694Y2 JP 1988130168 U JP1988130168 U JP 1988130168U JP 13016888 U JP13016888 U JP 13016888U JP H0728694 Y2 JPH0728694 Y2 JP H0728694Y2
Authority
JP
Japan
Prior art keywords
disk
arm
semiconductor substrate
ion implantation
substrate ion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP1988130168U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0250955U (en]
Inventor
直登 田代
Original Assignee
九州日本電気株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 九州日本電気株式会社 filed Critical 九州日本電気株式会社
Priority to JP1988130168U priority Critical patent/JPH0728694Y2/ja
Publication of JPH0250955U publication Critical patent/JPH0250955U/ja
Application granted granted Critical
Publication of JPH0728694Y2 publication Critical patent/JPH0728694Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP1988130168U 1988-10-03 1988-10-03 半導体基板イオン注入装置 Expired - Fee Related JPH0728694Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988130168U JPH0728694Y2 (ja) 1988-10-03 1988-10-03 半導体基板イオン注入装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988130168U JPH0728694Y2 (ja) 1988-10-03 1988-10-03 半導体基板イオン注入装置

Publications (2)

Publication Number Publication Date
JPH0250955U JPH0250955U (en]) 1990-04-10
JPH0728694Y2 true JPH0728694Y2 (ja) 1995-06-28

Family

ID=31385096

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988130168U Expired - Fee Related JPH0728694Y2 (ja) 1988-10-03 1988-10-03 半導体基板イオン注入装置

Country Status (1)

Country Link
JP (1) JPH0728694Y2 (en])

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0163130U (en]) * 1987-10-16 1989-04-24

Also Published As

Publication number Publication date
JPH0250955U (en]) 1990-04-10

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